The ContourGT model is a 3D optical microscope based on white light interferometry (WLI) technology. This optical metrology system is characterized by a unique combination of high-speed operation, sub-nanometer resolution in the vertical (z) axis, sub-micrometer spatial resolution and wide field of view.
As such, this system provides highest levels of precision, repeatability, and measurement reproducibility.
Critical semiconductor metrology includes measurements of:
- Film thickness
- Surface and substrate roughness
- Critical dimensions (e.g., line width, height, diameter, pitch, and via or trench depth)