Dektak Stylus Profiler


Model: Dektak 8

​The Dektak 8 profiler from BRUKER, characterizes film thickness, roughness, stress and defects on samples up to 200 mm (8 inches) in length. The system's low-force tip technology, long-scanning capability and versatile data analysis software enable applications such as:

  • ​MEMS characterization
  • Thin- and thick-film coatings
  • Thin-film stress calculations
  • Roughness on wafers and machined parts
  • Transparent files and photo resist thickness
  • Metal etch uniformity
  • Compound semiconductor devices on GaAs wafers
  • Microlens height/curvature
  • V-groove depth
  • Surface quality and defect review