Solution Processing and Device Fabrication Laboratory

Solution Processing and Device Fabrication Laboratory

​​​​​​This multi-functional facility allows fabrication of organic, inorganic and hybrid semiconductor devices based on a wide range of solution-processing methods in controlled and inert environment.  In addition to standard device characterization equipment, the lab offers advanced equipment for PV device analysis in inert atmospheres, including photo-CELIV and PCT Photoelectric defect analysis.

This facility hosts research equipment under inert environment including:

  • ​Inkjet printers
  • Small scale gravure and offset printers
  • Screen printers
  • Meniscus and blade coaters
  • Spray coaters
  • Vacuum deposition chambers featuring thermal evaporation, sputtering, e-beam, and ion-beam sputtering
  • Research-scale device testing equipment
  • Multiprobe units
  • Research scale encapsulation instrumentation
  • Plasma and ozone treatment capability
  • Spin coaters
  • Kelvin probe measurements units
  • Nanoembossing and nanoimprint capability, and supporting tools
  • OLEDs and solar cell testing equipment
  • TFT transistor stations
  • Impedance measurement units

In addition, stand-alone inkjet printers, stand-alone spin coaters for photoresists and aqueous based materials, a direct write system, and other supporting tools are available. A dedicated synthetic chemistry facility with inert environment manifolds (Schlenk line) is also available.


  • Thermal Evaporator Brand: Angstrom Engineering,
    Model: Amod Thermal evaporator
    Thermal Evaporator We carry various thin film deposition systems from Angstrom Engineering for thermally depositing a wide range of materials including metals, organic and inorganic small molecules. The deposition rate is controlled using quartz crystal sensors to ensure consistent, high-quality film formation.
  • Vacuum Sputter Deposition System Brand: Angstrom Engineering,
    Model: Amod Sputter Deposition
    Vacuum Sputter Deposition System Our system is configured to support two types of sputter deposition: RF sputtering, DC sputtering. Each of these deposition methods uses a process sputter gas, which is usually an inert gas like argon with reactive gases added for certain processes.
  • Vacuum e-Beam Deposition Brand: Angstrom Engineering,
    Model: Amod e-Beam Deposition
    Vacuum e-Beam Deposition We are using our e-Beam deposition system to deposit thick films of all kinds of metals, and many metal oxides for solar cell applications.
  • Inkjet Printer Brand: Dimatix,
    Model: DMP-2831
    Inkjet Printer The DMP-2831 allows the deposition of fluidic materials on an 8x11 inch or A4 substrate, utilizing a disposable piezo inkjet cartridge. This printer can create and define patterns over an area of about 200 x 300 mm and handle substrates up to 25 mm thick with an adjustable Z height.
  • Paios—Electrical Device Characterization Brand: FLUXiM,
    Model: Paios
    Paios—Electrical Device Characterization The Paios system from Fluxim performs a variety of electrical and opto-electronic techniques ideally suited for thin-film device characterization.
  • IQE-EQE Brand: Newport,
    Model: Oriel IQE-200
    IQE-EQE The equipment permits simultaneous measurements of both the external quantum efficiency (EQE) and the internal quantum efficiency (IQE) of solar cells, detectors, or any photon-to-charge converting devices.
  • Solar Simulator, I-V Measurement Brand: Oriel,
    Model: Sol3A
    Solar Simulator, I-V Measurement Oriel Sol3A solar simulators use a single lamp design to meet Class A requirements for three performance criteria without compromising the 1 Sun output power. This solar simulator fulfills class AAA, with the first letter representing Spectral performance, the second letter Uniformity of Irradiance, and the third letter Temporal Stability.
  • BoTest I-V Measurement Brand: BoTest,
    Model: LIV
    BoTest I-V Measurement The LIV from BoTest is a system for functionality testing of organic electronics. It establishes characterization data for OLEDs, OPVs, organic sensors, and other organic semiconductor devices.
  • Scanning Kelvin Probe and Surface Photovoltage Spectroscopy Brand: KP Technology,
    Model: Kelvin Probe
    Scanning Kelvin Probe and Surface Photovoltage Spectroscopy The Kelvin probe is a non-contact, non-destructive vibrating capacitor device used to measure the work function (WF) of conducting materials or surface potential (SP) of semiconductor or insulating surfaces. This system from KP Technology offers a WF resolution of 1-3 meV. The high-resolution 3-axis translation stage allows performing 50 x 50 mm 2D scans. The Kelvin probe is set up inside a Faraday and light enclosure to prevent from unwanted electromagnetic interferences.
  • Tencor Stylus Profiler Brand: TENCOR,
    Model: P-7
    Tencor Stylus Profiler The P-7 stylus profiler from TENCOR is a surface measurement system with 150 mm scan length standard. It offers good measurement repeatability and reliable height measurement performance. Its sensor includes dynamic force control, excellent linearity, and high vertical resolution. Finally, this stylus profiler's surface measurement system includes point-and-click operation.
  • Dektak Stylus Profiler Brand: BRUKER,
    Model: Dektak 8
    Dektak Stylus Profiler The Dektak 8 profiler from BRUKER, characterizes film thickness, roughness, stress and defects on samples up to 200 mm (8 inches) in length.
  • Water Vapor Permeability Brand: MONCO,
    Model: Permatran 3/33 MG+
    Water Vapor Permeability This two cell water vapor transmission rate (WVTR) testing system is ideal for testing flat films, finished packages and components. It consists of 3 separate master instruments which can be expanded up to 9 satellite units, providing a total of 20 cells.
  • Contact Angle Measurement Brand: KRUSS,
    Model: DSA100
    Contact Angle Measurement The Drop Shape Analyzer DSA100 from KRUSS is a high-quality instrument for analyzing wetting and adhesion on solid surfaces.
  • Stereomicroscope Brand: Zeiss,
    Model: AX10
    Stereomicroscope A particularly interesting feature of this optical microscope is the noticeably improved three-dimensional image perception. It helps the user to prepare and manipulate samples. Image acquisition is supported by a 8:1 zoom range. The selectable click-stops for discrete magnification steps allows the user to calibrate pixel sizes in the imaging software packages ZEN and AxioVision.