The EVG510HE semi-automated hot embossing system is designed for embossing and nanoimprinting applications.
The hot embossing system is configured with a universal embossing chamber, high-vacuum and high-contact force capabilities and manages the whole range of polymers suitable for hot embossing.
Together with high-aspect ratio embossing and multiple de-embossing options many processes for high quality pattern transfer and nm resolution are offered.
- Suitable for hot embossing applications of polymer substrates and spin-on polymers
- Automated embossing process
- Separate alignment process for optically aligned embossing and imprinting
- Fully software controlled process execution
- Closed loop cooling water supply option
- External de-embosssing and cooling station
- UV-Nanoimprint option