The Jipelec JetFirst 200 benchtop RTP features a temperature measurement and control system using pyrometers and thermocouples to provide accurate and repeatable thermal behavior from low to high temperatures. The system is also equipped with a primary pump and 4 different gas lines for a better control of the environment before and during the thermal process.
- Up to 8" wafers
- Temperature range : ambient to 1300°C
- Ramp rate : 1°C/s to 300°C/s
- Gas introduction capability: N2, H2/N2 (forming gas), O2, Ar
- Atmospheric and vacuum process capabilities
- One purge gas line
- Vacuum valve and vacuum gauge