This tool enables electron beam evaporation. A filament emits a magnetically focused high energy beam of electrons, which is directed onto a crucible containing the deposition material. Large capacity pockets and multi-pocket indexing designs allow greater film thickness and an increase in process runs, avoiding vacuum breaks to load material. High melting point materials can be deposited at high deposition rates.
We are using our e-Beam deposition system to deposit thick films of all kinds of metals, and many metal oxides for solar cell applications.