Ellipsometer VUV-VASE

Brand: J. A. Woollam


The J. A. Woollam VUV-VASE® variable angle spectroscopic ellipsometer is ideally suited for optical characterization of lithographic thin films. It measures wavelengths from vacuum ultraviolet (VUV) to near infrared (NIR). This provides high versatility to characterize numerous materials, particularly, semiconductors, dielectrics, polymers, metals, multi-layers and liquids such as immersion fluids.


  • The VUV-VASE can measure any wavelengths between 140 nm and 1700 nm, or photon energies between 0.73 eV and 9 eV
  • Nitrogen Purge
  • Angle Range: The VUV-VASE system features automated angle of incidence with wide angular coverage: 10° – 90° (wavelengths <300nm) & 20° – 90° (wavelengths >300nm)
  • Automated Sample Alignment: Load your sample and the stage automatically aligns to ensure proper sample placement (tip-tilt-z).