The EVG101 is an advanced resist processing system that performs automated spin coating/spray coating/developing processes in a single chamber design. The EVG101 supports wafers up to 300 mm in size.

 

The Spin processor is equipped with a spray nozzle and a liquid dispense arm for EBR and spin coating.

 

This tool has one bowl and 2 swivel arms. The left arm is the atomizer for spray coating, the right arm is a spin coating arm with EBR. The resist is loaded into a syringe and dispensed using a step motor.