Brand: EV Group
Model: EVG 105
The EVG 105 is ideally suited for softbake, post-exposure bake and hardbake processes. A controlled baking environment assures uniform evaporation. Programmable proximity pins provide the best available control of resist hardening processes and temperature profiles.
- Max. temperature 150 °C
- Lift pins for manual wafer loading/unloading
- Timer control
- Substrate vacuum (direct contact bake)