Resist Bake Module

Brand: EV Group

Model: EVG 105

The EVG 105 is ideally suited for softbake, post-exposure bake and hardbake processes. A controlled baking environment assures uniform evaporation. Programmable proximity pins provide the best available control of resist hardening processes and temperature profiles.
  • Max. temperature 150 °C
  • Lift pins for manual wafer loading/unloading
  • Timer control
  • Substrate vacuum (direct contact bake)