Scanning Electron Microscopy

Brand: Zeiss

Model: Auriga

This Zeiss Auriga workstation is a crossbeam high resolution SEM equipped with Focus Ion Beam (FIB) column and EDS allowing for unique imaging possibilities, advanced analytics and precise processing at a nanoscale level. The main features of the equipment are:

  • A Schottky Field Emitter, resolution of 1.0 nm @ 15 kV, 1.9 nm @ 1 kV, acceleration voltage between 0.1 and 30 kV.
  • A dual SEM and FIB column
  • Ga liquid metal ion source (LMIS), resolution <7 nm @ 30 kV, acceleration voltage between 1 and 30 kV, probe current between 1 pA and 50 nA.
  • Detectors: secondary electrons (SE), In-Lens SE and BSD detectors
  • Possibility of 3D reconstruction using combined SEM and FIB columns.
  • Energy dispersive spectroscopy (Quantax EDS from Brucker).
  • Gas injection system.
  • Nanolithography using electrons or ions, milling of imported bitmaps or CAD files, electrostatic beam blanker