Semi-Automated Hot Embossing System

Brand: EV Group

Model: EVG 510HE

The EVG510HE semi-automated hot embossing system is designed for embossing and nanoimprinting applications. 

 
The hot embossing system is configured with a universal embossing chamber, high-vacuum and high-contact force capabilities and manages the whole range of polymers suitable for hot embossing.
 
Together with high-aspect ratio embossing and multiple de-embossing options many processes for high quality pattern transfer and nm resolution are offered.

Features:
  • Suitable for hot embossing applications of polymer substrates and spin-on polymers
  • Automated embossing process
  • Separate alignment process for optically aligned embossing and imprinting
  • Fully software controlled process execution
  • Closed loop cooling water supply option
  • External de-embosssing and cooling station
  • UV-Nanoimprint option