The EVG620NT Semi Automated Mask Alignment System handles sizes of substrates starting from less than 5 mm up to 150 mm. It offers features, including a granite base, active vibration isolation and linear motors to meet higher precision and throughput requirements.

 

The layout provides flexible and versatile aligner platforms, alignment accuracies improvements-down to 0.1 µm and in-situ alignment verification, allowing users to scale from R&D efforts to volume manufacturing in a relatively simple one-to-one transfer process, making use of a full automation mode.