Tencor P-7 Stylus Profiler


Model: P-7

The P-7 stylus profiler from TENCOR is a surface measurement system with 150 mm scan length standard. It offers good measurement repeatability and reliable height measurement performance. Its sensor includes dynamic force control, excellent linearity, and high vertical resolution. Finally, this stylus profiler's surface measurement system includes point-and-click operation.


  • ​Thick and thin film step height measurements
  • Photo resist / soft films
  • Etched trench depth
  • Materials characterization for surface roughness and waviness
  • Surface curvature and form
  • 2D stress of thin films
  • Dimensional analysis and surface texture
  • 3D imaging of various surfaces
  • Flatness or curvature